Shadow Nanosphere Lithography
Shadow Nanosphere Lithography
Dokument öffnen (1.9MB)Art der Hochschulschrift
DissertationPrüfungsdatum
16.08.2007Datum der Veröffentlichung
2007Erstgutachter
Buse, KarstenZweitgutachter
Maier, KarlMetadaten
Zur Langanzeige
Zitierbare Links 
Inhalt
This thesis presents a lithographic method, based on self-assembled two-dimensional colloidal crystals, for fabrication of large-area (> cm2) arrays of nanostructures. Preparation of colloidal crystals (≈ 200 cm2) at the air-water interface is shown and discussed. Obtained crystals are used as lithographic masks. Utilizing shadow evaporation and reactive ion etching different nanoparticles are manufactured, such as dots, triangles, rods, rings, wires, pillars, and layers perforated with holes of various shape. Geometrical dependences of the size and shape of nanoparticles are shown and compared with experimental results.
Schlagwörter
shadow, nanosphere, lithography, colloidal crystals, microspheres, monolayer
Klassifikation (DDC)
530 PhysikKandulski, Witold: Shadow Nanosphere Lithography. - Bonn, 2007. - Dissertation, Rheinische Friedrich-Wilhelms-Universität Bonn.
Online-Ausgabe in bonndoc: https://nbn-resolving.org/urn:nbn:de:hbz:5N-11484
Online-Ausgabe in bonndoc: https://nbn-resolving.org/urn:nbn:de:hbz:5N-11484
@phdthesis{handle:20.500.11811/3134,
urn: https://nbn-resolving.org/urn:nbn:de:hbz:5N-11484,
author = {{Witold Kandulski}},
title = {Shadow Nanosphere Lithography},
school = {Rheinische Friedrich-Wilhelms-Universität Bonn},
year = 2007,
note = {This thesis presents a lithographic method, based on self-assembled two-dimensional colloidal crystals, for fabrication of large-area (> cm2) arrays of nanostructures. Preparation of colloidal crystals (≈ 200 cm2) at the air-water interface is shown and discussed. Obtained crystals are used as lithographic masks. Utilizing shadow evaporation and reactive ion etching different nanoparticles are manufactured, such as dots, triangles, rods, rings, wires, pillars, and layers perforated with holes of various shape. Geometrical dependences of the size and shape of nanoparticles are shown and compared with experimental results.},
url = {https://hdl.handle.net/20.500.11811/3134}
}
urn: https://nbn-resolving.org/urn:nbn:de:hbz:5N-11484,
author = {{Witold Kandulski}},
title = {Shadow Nanosphere Lithography},
school = {Rheinische Friedrich-Wilhelms-Universität Bonn},
year = 2007,
note = {This thesis presents a lithographic method, based on self-assembled two-dimensional colloidal crystals, for fabrication of large-area (> cm2) arrays of nanostructures. Preparation of colloidal crystals (≈ 200 cm2) at the air-water interface is shown and discussed. Obtained crystals are used as lithographic masks. Utilizing shadow evaporation and reactive ion etching different nanoparticles are manufactured, such as dots, triangles, rods, rings, wires, pillars, and layers perforated with holes of various shape. Geometrical dependences of the size and shape of nanoparticles are shown and compared with experimental results.},
url = {https://hdl.handle.net/20.500.11811/3134}
}
Die folgenden Nutzungsbestimmungen sind mit dieser Ressource verbunden:
