Zur Kurzanzeige

Shadow Nanosphere Lithography

dc.contributor.advisorBuse, Karsten
dc.contributor.authorKandulski, Witold
dc.date.accessioned2020-04-10T17:30:23Z
dc.date.available2020-04-10T17:30:23Z
dc.date.issued2007
dc.identifier.urihttps://hdl.handle.net/20.500.11811/3134
dc.description.abstractThis thesis presents a lithographic method, based on self-assembled two-dimensional colloidal crystals, for fabrication of large-area (> cm2) arrays of nanostructures. Preparation of colloidal crystals (≈ 200 cm2) at the air-water interface is shown and discussed. Obtained crystals are used as lithographic masks. Utilizing shadow evaporation and reactive ion etching different nanoparticles are manufactured, such as dots, triangles, rods, rings, wires, pillars, and layers perforated with holes of various shape. Geometrical dependences of the size and shape of nanoparticles are shown and compared with experimental results.en
dc.language.isoeng
dc.rightsIn Copyright
dc.rights.urihttp://rightsstatements.org/vocab/InC/1.0/
dc.subjectshadow
dc.subjectnanosphere
dc.subjectlithography
dc.subjectcolloidal crystals
dc.subjectmicrospheres
dc.subjectmonolayer
dc.subject.ddc530 Physik
dc.titleShadow Nanosphere Lithography
dc.typeDissertation oder Habilitation
dc.publisher.nameUniversitäts- und Landesbibliothek Bonn
dc.publisher.locationBonn
dc.rights.accessRightsopenAccess
dc.identifier.urnhttps://nbn-resolving.org/urn:nbn:de:hbz:5N-11484
ulbbn.pubtypeErstveröffentlichung
ulbbnediss.affiliation.nameRheinische Friedrich-Wilhelms-Universität Bonn
ulbbnediss.affiliation.locationBonn
ulbbnediss.thesis.levelDissertation
ulbbnediss.dissID1148
ulbbnediss.date.accepted16.08.2007
ulbbnediss.fakultaetMathematisch-Naturwissenschaftliche Fakultät
dc.contributor.coRefereeMaier, Karl


Dateien zu dieser Ressource

Thumbnail
Name:
1148.pdf
Größe:
1.9MB
Format:
PDF
Dokument öffnen

Das Dokument erscheint in:

Zur Kurzanzeige

Die folgenden Nutzungsbestimmungen sind mit dieser Ressource verbunden:

InCopyright