Development of depleted monolithic active pixel sensors for high rate and high radiation experiments at HL-LHC

Abstract

Depleted monolithic active pixel sensors (DMAPS) are developed to demonstrate their suitability for high energy particle physics experiments in high radiation and high hit-rate environments. In this thesis, characterization of DMAPS prototypes in the large fill factor design using highly resistive wafers has been performed. Three prototypes, including a large-scale and fully-monolithic prototype, were fabricated using 150 nm CMOS technology on highly resistive (>2 kΩcm) wafers. The results of the characterization indicate that the DMAPS has capabilities to fulfill the requirements for the outer layers of the ATLAS ITk Pixel Detector. DMAPS prototypes coupled with an additional readout chip are also tested for future applications.